• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Sealing device for a passage between a first machine element (1), and a second machine element (2), which comprises a first (14) and a second (15) sealing element; the intermediate space between the first (14) and the second (15) sealing element being subdivided into a first (8) and a second (9) chamber which are connected to each other by a circular slot ( 6) between the first machine element (1) and the sealing device, and the first chamber (8) having an inlet (11) for a flushing fluid (19) and the second chamber (9) having a first outlet (12) to evacuate the flushing fluid. (fig. 1)
    公开号:BE1019664A3
    申请号:E2010/0739
    申请日:2010-12-15
    公开日:2012-09-04
    发明作者:Hans-Juergen Heinrich；Harald Grune；Goetz Grosser
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a sealing device which can be used for static seals but which can also be used for rotating passages as used, for example, in vacuum coating plants. Such sealing devices are described, for example, in DE 10 2009 014 214.
    Rotating passages are required to pass rotating parts, such as for example shafts, through housing walls and the like, when the machine member driving, for example a driving device, is arranged on one side of the housing. the housing wall and that the machine element to be driven, for example a rotating target, is disposed on the other side of the housing wall. On the other hand, static gaskets serve to move immovable parts through the housing walls.
    When between the two sides of the housing wall a pressure difference must be maintained (eg atmospheric pressure on one side, very high vacuum on the other side) and / or the atmospheres on both sides of the wall of housing are of different composition (for example, air on one side and inert gas on the other side), it is then necessary to make the rotating passage so as to prevent unintentional pressure compensation or a gas exchange between both sides of the housing wall, which are caused by leaks from the rotating passage.
    For example, static gaskets or rotary passages for vacuum coating installations may have two gaskets, a gasket being arranged to provide a seal with respect to the atmosphere or vacuum and the another seal being arranged to seal against the vacuum or process atmosphere or other fluid, for example a coolant. Between these two seals, it is possible to achieve a total separation of the fluids for example with a stop fluid, that is to say with a stop gas or a stop liquid. Alternatively, it is possible to achieve a separation of the atmosphere and the treatment space with an intermediate vacuum generated between the two packings.
    Rotating passages which are intended to safely separate incompatible fluids from each other are generally two-stage or multi-stage. To prematurely detect harmful wear of the seals, leak monitoring is often used. In some embodiments, electronic wear marks that detect the degree of wear are used. In other solutions, the leaks are measured quantitatively by means of sensors between the sealing lips.
    Other non-wear detection solutions use stop fluids that do not harm either of the two fluids to be separated. It is also known that certain solutions in the case of seals for cooling water arrive at a drying of the intermediate space by blowing compressed air at the location of the leak. The blowing has the consequence that cooling water for example can also reach the other sealing lip due to the leakage. The second fluid is polluted in case of non-sealing of the sealing lip.
    The object of the invention is to detect in a timely manner, with a simple structure of the sealing system, the risk of leakage of the sealing lip on the fluid side and to prevent as far as possible that the second lip sealing is wetted by the leakage of the first fluid.
    According to the invention, the object is achieved because the sealing combination is provided with two sealing lips. The space between the two sealing lips is subdivided into two chambers which are interconnected by a common annular slot. A flushing fluid pushes the incoming leak through the annular slot into holes to control the leakage.
    A circular slot within the meaning of the invention is a first zone which closely surrounds a first machine element and which is large enough to prevent collisions of the sealing device with the first machine element but which is at the same time sufficiently wide for let a flushing fluid such as water or air pass through. By cons, the chambers separated by the circular slot and also surrounding the first machine member have a significantly larger diameter to be able to receive a selectable volume of the flushing fluid.
    It is therefore proposed a sealing device for a passage for receiving a first machine element, the outer side of which can be applied against a second machine element, and which comprises a first sealing element and a second sealing element. sealing arranged in the axial direction of the first machine member at a distance from the first sealing member, the inner sides of which are designed to form an active sealing connection with the first machine member, the intermediate space between the first and second sealing elements; sealing member and the second sealing member being subdivided into a first chamber and a second chamber which are connected to each other by a circular slot between the first machine member and the sealing device, and the first chamber having an inlet for a rinsing fluid and the second chamber having a first chamber to evacuate or aspirate the rinsing fluid and any leaks.
    The sealing elements can be applied, for example, against a base body made as a rotary part whose outer side can be applied against a second machine element, for example an apparatus housing or a vacuum chamber wall. for example, in that the base body is connected to it by a flange or is inserted into a hole provided for this purpose or into another orifice and is fixed thereto, for which reason other sealing elements may be provided. on the outside of the basic body. The base body may further be designed such that it has on its inner side a peripheral rib which forms the circular slot in cooperation with the first machine element.
    In an improvement, a third sealing element is arranged in the axial direction of the first machine element at a distance from the first sealing element, the space between the first sealing element and the third sealing element having an outlet for evacuating or aspirating the rinsing fluid as well as any leaks. This third chamber with the associated suction further significantly improves the sealing action of the sealing device.
    The inlet for the rinsing fluid and / or the first outlet and / or the second outlet for evacuation or suction can be respectively guided from outside to inside through the sealing device in the first room. This embodiment can be advantageous in particular for first rotating machine elements to simplify the supply and discharge of fluids.
    The inlet for the rinsing fluid and / or the first outlet and / or the second outlet for evacuation or suction can also be respectively guided from inside to outside through the first machine element in the first room. This embodiment can be advantageous in particular for first rotating machine elements, when the supply and the evacuation of the fluids must take place on the empty side, or for first stationary machine elements.
    The proposed sealing device is suitable for example for a rotating passage subjected to the pressure of cooling fluid, which must protect leakage space in the atmosphere by two rotation joints.
    Another embodiment may provide that the flushing fluid pressure is continuously monitored to detect a failure of the first sealing member. For this purpose, the sealing device is in active connection with a monitoring device.
    Another embodiment may also provide that the pressure of the rinsing fluid is maintained proportional to the pressure of the cooling fluid to obtain an optimal sealing behavior of the second sealing element. For this purpose, the sealing device can be in active connection with a control device.
    Since the sealing principle is mainly due to the separation of two incompatible fluids, application to a vacuum chamber is not to be equated with other applications. It should also be borne in mind here that prior to vacuum sealing, additional suction - as described above - may be useful to satisfy higher vacuum requirements.
    The invention will be explained in more detail below on the basis of exemplary embodiments and related drawings. These show on fig. A first embodiment; fig. A second embodiment; fig. A third embodiment; fig. 4 a fourth embodiment.
    In the exemplary embodiments of FIGS. 1 to 3, the sealing device has a separate base body 4 which is sealed with respect to the second machine element 3 by external sealing elements 7.
    On the base body 4 are arranged a first sealing element 14 and a second sealing element 15 which establish a sealing connection with the first machine element 1, a shaft. The first sealing element 14 separates the rinsing fluid 19 (for example dry compressed air) from the atmosphere 20. The second sealing element 15 separates the cooling fluid 17 from the rinsing fluid 19.
    The base body 4 has a peripheral rib 5 which has an inside diameter slightly larger than the outside diameter of the shaft 1 so that an annular slot 6 is formed. The annular slot 6 is suitably disposed around the periphery of the shaft, but other arrangements of the annular slot 6 are also possible, as will be explained in more detail below in the description of the various figures. For example, a peripheral step 2 of larger diameter may be disposed on the shaft and form with the base body 4 or a peripheral rib 5 of the base body 4 an annular slot 6, or a peripheral rib 5 of the basic body 4 engages in a peripheral groove of the shaft 1. In the latter case, the base body 4 may, for example, be divided in two to allow assembly and disassembly.
    The sealing device can be sealed, for example, by static external sealing elements 7 (O-rings) in the second machine element 3 which can be, for example, a housing.
    The cooling fluid 17 applied with a pressure produced on the second sealing member 15 inevitably leaks coolant. At the inlet 11 for the rinsing fluid 19, dry compressed air is blown, with a pressure lower than the pressure of the coolant 17 to not lift the second sealing member 15. Dry compressed air 19 flows into holes, which can be uniformly distributed around the periphery, in the first chamber 8 between the first sealing element 14 and the annular slot 6. The dry compressed air 19 flowing through the narrow slot ring 6 prevents the progression of coolant leaks 18 to the first sealing member 14 on the atmosphere side. The dry compressed air 19 flows from the first chamber 8 into the second chamber 9 through the annular slot 6. The annular slot 6 is kept very small so that the dry compressed air 19 has a high flow rate.
    Due to the rapid flow of dry air 19, the leakage of the coolant 18 is immediately removed from the annular slot 6 and transported through holes to the first outlet 12 for leakage control. Outside the passageway shown, the quantitative evaluation of the leaks takes place according to known methods. For the fluids that are cooling water 18 and dry air 19, it is the humidity of the air that is measured and evaluated.
    In principle, this solution can be used for all combinations in which the rinsing fluid 19 and the cooling fluid 18 can mix and the rinsing fluid 19 is not critical on the atmosphere side 20. When combustible cooling fluids are used, it is possible to envisage the use of nitrogen or air with reduced oxygen content as a rinsing fluid 19.
    The figures show different embodiments of the described sealing device.
    Fig. 1: A first machine element 1 (shaft) is rotatably mounted in a sealing device which has a base body 4 and is disposed on its side in a second machine element 3 (housing). The sealing device comprises a base body 4 (ring) which has two sealing lips 14, 15. These sealing lips 14, 15 are in contact with the surface of the first machine element 1. On the inner side of the 3, the coolant 17 is applied under pressure to the first sealing lip 15. On the outer side of the housing 3, the atmospheric pressure 20 is applied to the first sealing lip 14.
    Orifices passing through the housing 3 lead to the ring 4 and serve as an inlet 11 for a rinsing fluid 19 and a first outlet 12 for the evacuation of the rinsing fluid 19. These orifices open into other orifices which are practiced in the ring 4 and which serve to conduct the rinsing fluid 19 in a first chamber 8 or to evacuate any leakage of the cooling fluid 18 of the second chamber 9. The orifices extend radially in the ring 4 and are distributed over the periphery of the ring 4. On the outer side of the ring 4 extend peripheral channels which distribute the flushing fluid 19 of the orifice in the housing 3 between the radial holes of the ring 4 (inlet) or collect the flushing fluid and leaks 18 from the radial holes of the ring 4 to lead into the hole of the housing 3 (outlet).
    The first chamber 8 and the second chamber 9 are connected to one another by an annular slot 6 through which the rinsing fluid 19 arrives from the first chamber 8 into the second chamber 9, which at the same time prevents leaks from the second chamber 9 do not enter the first chamber 8.
    Fig. 2: This embodiment differs from the embodiment according to FIG. 1 in that the inlet 11 for the rinsing fluid 19 is not guided through the second machine element 3 (housing) and the body of the base 4 (ring) in the first chamber 8 but that this inlet 11 is formed by orifices in the first machine element 1 (shaft).
    An axially extending orifice conducts the rinsing fluid 19 in the zone of the first chamber 8. Several orifices distributed around the periphery of the shaft 1 extend from this axial orifice in the radial direction and open out onto the surface of the chamber. 1 in the zone of the first chamber 8.
    Fig. 3: This embodiment is distinguished from the embodiment according to Figure 2 in that the shaft 1 has in the area of the sealing device a step 2 and that the sealing lips 14, 15 therefore have a different inner diameter. The penetration into the first chamber 8 of coolant leaks from the second chamber 9 is made even more difficult by the step 2.
    Fig. 4: In this embodiment, it is a static passage in which the first machine element 1 is stationary relative to the second machine element 3. O-rings are used as sealing elements 14, 15, 16 instead of sealing lips in the exemplary embodiment; but sealing lips can also be used as in the other embodiments. The sealing device does not have a separate base body 4 in this embodiment; on the contrary, the constituent parts of the sealing device are integrated directly into the second machine element 3.
    In this embodiment, it is necessary to seal between the pressure of the coolant 17 acting from one side of the sealing device and the high vacuum 21 acting on the other side of the sealing device.
    Three sealing elements 14, 15, 16 (O-rings) are arranged one behind the other. The space between the O-ring 15 directed towards the interior space of the housing 3 and the first central O-ring 14 is further subdivided into a first chamber 8 and a second chamber 9 which are connected to one another by a annular slot 6. The space between the central O-ring 14 and the third O-ring facing the outer side of the housing 3 has a second outlet 13 for intermediate suction or vacuum.
    List of Order No. 1 First Machine Part 2 Peripheral Grate 3 Second Machine Part 4 Basic Body 5 Peripheral Rib 6 Annular Slot 7 Outer Seal Element 8 First Chamber 9 Second Chamber 10 Third Chamber 11 Inlet 12 First Outlet 13 Second outlet 14 First sealing element 15 Second sealing element 16 Third sealing element 17 Coolant pressure 18 Coolant leak 19 Rinsing fluid 20 Atmosphere 21 High vacuum
    权利要求:
    Claims (8)
    [1]
    Sealing device for a passageway for receiving a first machine element (1), whose outer side can be applied against a second machine element (2), and which comprises a first sealing element (14) and a second sealing member (15) disposed in the axial direction of the first machine member (1) at a distance from the first sealing member (14), whose inner sides are adapted to form an active sealing connection with the first machine element (1), the space between the first sealing element (14) and the second sealing element (15) being subdivided into a first chamber (8) and a second chamber (9) which are connected to each other by a circular slot (6) between the first machine element (1) and the sealing device, and the first chamber (8) having an inlet (11) for a fluid of rinse (19) and the second e chamber (9) having a first outlet (12) for discharging or aspirating the rinsing fluid as well as any leaks.
    [2]
    Sealing device according to claim 1, characterized in that a third sealing element (16) is arranged in the axial direction of the first machine element (1) at a distance from the first sealing element (14). ), the space between the first sealing element (14) and the third sealing element (16) having a second outlet (13) for discharging or sucking the rinsing fluid (19) as well as leaks (18). ) possible.
    [3]
    Sealing device according to Claim 1 or 2, characterized in that the inlet (11) for the rinsing fluid (19) is guided from the inside to the outside through the first machine element (1). ) in the first chamber (8).
    [4]
    Sealing device according to Claim 1 or 2, characterized in that the inlet (11) for the rinsing fluid (19) is guided from the outside towards the inside through the sealing device in the first room (8).
    [5]
    5. Sealing device according to any one of claims 1 to 4, characterized in that the first outlet (12) discharge or suction is guided from the inside to the outside through the first element of machine (1) in the second chamber (9).
    [6]
    6. Sealing device according to any one of claims 1 to 4, characterized in that the first outlet (12) discharge or suction is guided from the outside inwards through the device of sealing in the second chamber (9).
    [7]
    7. 1.A sealing device according to any one of claims 1 to 6, characterized in that the second outlet (13) discharge or suction is guided from the inside to the outside through the first machine member (10) in the third chamber (10).
    [8]
    8. Sealing device according to any one of claims 1 to 6, characterized in that the second outlet (13) discharge or suction is guided from the outside inwards through the device of sealing in the third chamber (10).
    类似技术:
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    同族专利:
    公开号 | 公开日
    DE102010027757A1|2011-06-22|
    DE102010027757B4|2015-12-10|
    US20110148048A1|2011-06-23|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    GB2140102A|1983-05-06|1984-11-21|Boc Group Plc|Improvements in shaft seals|
    US3030118A|1958-05-13|1962-04-17|Cocker Machine & Foundry Compa|Seal for a rotating shaft|
    FR2349771B1|1976-04-28|1981-10-30|Commissariat Energie Atomique|
    NO841210L|1983-04-21|1984-10-22|Mitsubishi Heavy Ind Ltd|SHAFT SEALING DEVICE|
    US4534569A|1983-09-27|1985-08-13|Mitsubishi Jukogyo Kabushiki Kaisha|Stern tube seal device providing a seal about a rotatable shaft|
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    JP4531346B2|2003-04-16|2010-08-25|イーグル工業株式会社|Rotary joint|
    US7798496B2|2003-11-05|2010-09-21|Kalsi Engineering, Inc.|Rotary shaft sealing assembly|
    DE102009014214A1|2008-12-22|2010-06-24|Von Ardenne Anlagentechnik Gmbh|Seal device for rotary feedthrough|DE102013106788B4|2013-06-28|2019-07-11|VON ARDENNE Asset GmbH & Co. KG|Vacuum treatment plant with vacuum chamber feedthrough|
    WO2017180658A1|2016-04-11|2017-10-19|Prippell Technologies, Llc|Dynamic fluid seal|
    US10473222B2|2016-04-11|2019-11-12|Prippell Technologies, Llc|Dynamic fluid seal|
    法律状态:
    2018-02-08| MM| Lapsed because of non-payment of the annual fee|Effective date: 20161231 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102009059099|2009-12-18|
    DE102009059099|2009-12-18|
    DE102010027757|2010-04-14|
    DE102010027757.6A|DE102010027757B4|2009-12-18|2010-04-14|Feedthrough for a machine element|
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